（mil.Yen、％） Saurce）Cabinet Offic
Semiconductor making equipment	10	11	12	07.1	2	3	4	5	6	7	8	9
New orders	143,785	148,776	249,911	222,240	124,091	165,421	152,200	129,394	153,512	124,483	131,793	140,930
R.S.	-12.7	15.9	40.9	50.0	-15.4	-30.4	-12.0	-32.5	-53.2	-21.0	-27.5	-37.8
Sales	151,756	158,568	188,837	148,935	141,121	268,708	131,570	162,233	205,871	199,647	183,894	206,173
R.S.	86.4	37.4	29.2	36.9	11.9	9.4	6.0	-32.9	5.2	16.9	11.6	1.2
Remainders	871,995	862,182	922,586	996,875	979,789	874,642	897,292	864,365	810,795	735,591	683,368	623,327
R.S.	45.8	40.5	43.0	45.6	37.1	20.8	18.0	21.4	-3.7	-11.2	-19.2	-28.6
Semiconductor making equipment	10	11	12	08.1	2	3	4	5	6	7	8	9
New orders	138,415	161,524	206,183	198,325	150,855	208,392	131,268	167,141	149,025	133,858	81,772	143,288
R.S.	-3.7	8.6	-17.5	-10.8	21.6	26.0	-13.8	29.2	-2.9	7.5	-38.0	1.7
Sales	127,045	139,682	166,961	152,232	144,505	233,015	107,626	110,141	159,375	102,561	114,007	161,485
R.S.	-16.3	-11.9	-11.6	2.2	2.4	-13.3	-18.2	-32.1	-22.6	-48.6	-38.0	-21.7
Remainders	644,584	666,429	705,654	751,490	757,841	727,142	750,815	808,105	797,758	828,914	795,222	779,395
R.S.	-26.1	-22.7	-23.5	-24.6	-22.7	-16.9	-16.3	-6.5	-1.6	12.7	16.4	25.0