SaurcejMinistry of Economy Trade and Industry
Semiconductor manufacturing system@(Million yen)
12 06.1 2 3 4 5 6 7 8 9 10 11
Production
107,495 90,607 91,968 143,863 89,976 86,263 116,446 111,419 111,877 130,002 99,941 107,140
RS.
0.0 -0.3 5.5 3.7 19.2 30.8 30.8 26.5 32.6 14.7 23.2 16.6
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Semiconductor manufacturing system@(Million yen)
12 07.1 2 3 4 5 6 7 8 9 10 11
Production
121,652 115,765 116,095 156,070 109,837 127,765 152,516 146,069 137,419 118,884 109,241 104,309
RS.
13.2 27.8 26.2 8.5 22.1 48.1 31.0 31.1 22.8 -8.6 9.3 -2.6